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Solutions

Inspection Of Silicon Wafer Carriers

Application

  • Silicon wafer carrier for semiconductor chip production
  • Inspection of shallow pockets 40-50µm deep

Solution

Benefits

  • Cost effective – upgrade of an existing CMM to multi-sensor laser scanning, existing touch probe programs and legacy software still used with the touch probe
  • Small feature – inspection of carrier pockets too shallow for touch probe to access
  • Time saving – LC15Dx measures features in a single scan, saving hours in programming and inspection time compared with using a touch probe for the same application