Inspection Of Silicon Wafer Carriers

  • Silicon wafer carrier for semiconductor chip production
  • Inspection of shallow pockets 40-50µm deep
  • Cost effective - upgrade of an existing CMM to multi-sensor laser scanning, existing touch probe programs and legacy software still used with the touch probe
  • Small feature - inspection of carrier pockets too shallow for touch probe to access
  • Time saving - LC15Dx measures features in a single scan, saving hours in programming and inspection time compared with using a touch probe for the same application