Application
- Silicon wafer carrier for semiconductor chip production
- Inspection of shallow pockets 40-50µm deep
Solution
- LC15Dx line scanner
- TP200 touch probe
- CAMIO and FOCUS software
- Coordinate measuring machine upgrade
Benefits
- Cost effective - upgrade of an existing CMM to multi-sensor laser scanning, existing touch probe programs and legacy software still used with the touch probe
- Small feature - inspection of carrier pockets too shallow for touch probe to access
- Time saving - LC15Dx measures features in a single scan, saving hours in programming and inspection time compared with using a touch probe for the same application